We develop advanced battery technologies starting at the nanoscale, enabling both ultra-compact power sources for microelectronics and high-performance electrodes for larger energy storage systems. On one hand, we integrate 3D microbatteries into silicon-based microfabrication processes—much like the batch-scale techniques used to produce integrated circuits. These microbatteries can be built in parallel with the electronics themselves, ensuring a perfect fit with complex microelectronic architectures commonly found in the Internet of Things (IoT) devices. On the other hand, we apply modified laser micropatterning and roll-to-roll (R2R) fabrication methods to scale up from micro-patterned electrodes to thick, high-capacity electrode structures suitable for electric vehicles, renewable energy storage, and other large-scale applications. By carefully controlling nanoscale architecture and material composition, we bridge the gap between ultra-compact energy solutions and industrial-grade power systems.
Whether we’re powering a tiny sensor node embedded in a wearable device or improving the energy density of large-format batteries for clean transportation, our approach ensures that energy storage solutions can evolve seamlessly from microscale devices to macro-level infrastructure. This versatility offers a path toward more energy-efficient electronics, greener transportation, and sustainable grids.
To achieve these breakthroughs, we use a range of advanced fabrication and characterization techniques. For micro-scale devices, batch silicon processing (advanced 2D and 3D photolithography methods and chemical and physical deposition (e.g., CVD, PVD and ALD)) ensures precise patterning at submicron dimensions. For larger-scale batteries, R2R manufacturing compatible with laser micromachining enables rapid, continuous production of engineered electrodes. The challenge lies in integrating multiple materials—each with distinct mechanical, chemical, and electrical properties—into stable architectures that perform reliably under real-world conditions.